1、Beam collimating and splitting device :
Aperture of extended parallel beam: 1.2~1.5mm
Focal length of auxiliary lens :100mm
2、Goniometric rotating-disk:
Goniometric range:360°
Minimum scale:6"
Goniometric precision: ≤±15"
3、Photoelectric detecting system:
Alignment accuracy of zero angle: ≤±10"
Alignment accuracy of m-line synchronous angle:±20"
Remark: Patented product |